(1)-hand pump;

(2)-high-pressure membrane compressor;

(3)-manometrs;

(4)- regulating valves;

(5)-autoclave;

(6)-supercritical region;

(7)-furnace ahead the spray nozzle;

(8)-spray nozzle;

(9)-receiver;

(10)-forevacuum pump;

(11)-powder filter;

(12)-water cooler;

(13)-absorber with liquid nitrogen.